Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters

1. Introduction to Microelectromechanical Systems 2. Behavioral Studies of Micromachined Contact Switches 3. Single-Pole Multithrow MEMS Switching Networks 4. Lateral MEMS Switches and Switching Networks 5. Micromachined Microwave Phase Shifters 6. Digital MEMS Switched-Line Phase Shifters 7. DMTL Phase Shifter Design Using MAM Capacitors and a MEMS Bridge 8. Push-Pull Type of Micromachined Phase Shifters 9. Reconfigurable Micromachined Phase Shifters Using Push-Pull Actuators 10. Multifrequency MEMS Phase Shifter Bank 11. Reliability Analysis of MEMS Switches and Phase Shifters 12. MEMS 3-Bit and 4-Bit Phase Shifters Using Two Back-to-Back Switching Networks 13. Digital MEMS Phase Shifters Using Combinations of Switched-Line and DMTL Topologies 14. Packaging and Integration Technologies

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