Physics of Radiofrequency Capacitive Discharge

Foreword

Introduction

Abbreviations

1. Main physical properties and characteristics of radiofrequency capacitive discharge

2. Physical properties of near-electrode layers of space charge of RF capacitive discharge

3. Edge effects in the RF capacitive discharge

4. Near-electrode electron beams in RF capacitive discharge

5. Physical properties of RF gas discharge plasma

References

Index

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• Física química
• Semicondutores e supercondutores
• Física do plasma

RF Field;RF Discharge;RFCD;RF Voltage;RFCD plasma;Discharge Gap;near-electrode layers of a spatial discharge;Bpi;charge transport in electrodes;Apply RF Voltage;discrete mechanism of transport of plasma electrons to electrodes;Plasma Electrons;diagnosing RFCD;Grounded Electrode;Stochastic Heating;Gas Discharge Plasma;CVC;Electron Energy Distribution Function;Distribution Function;High RF Voltage;Ambipolar Diffusion;RF Detection;Interelectrode Distance;Negative Half Cycle;Positive Half Period;Space Charge Layer;External Electrodes;Beam Peak;High Energy Part;Contactless Method